The modification of surface properties of metal and semiconductor surfaces is important to tailor and modify the in vitro and in vivo interaction of these materials with biological systems, e.g. for implants, for diagnostics and control of cellular growth on such surfaces. We immobilize complex and bioactive peptides on such surfaces in a highly controlled manner by application of click chemistry. Methodology for reliable silanization to produce complete and flawless monolayer coverage by reaction with azidopropyl triethoxysilane will be presented. All reactions performed on the support were thoroughly characterized by fluorescence labeling and imaging. We show that elaborate washing procedures are required for proper production of covalently bound monolayers. Similar experiments were carried out, both with silanization and with thiolate modification of InAs wafers, often used in growth of Nanowires. The modifications of Nanowire arrays were compared to modification of the planar surfaces. CuAAC click reactions1 were optimized using model reactions on these types of substrates. The optimized conditions were used in CuAAC immobilization of adhesion peptide k-l-h-r-v-r-a-Pra-a-OH,2 a metabolically stable D-amino acid peptide that promote cell adhesion, proliferation and spreading of cells. The interaction of the membrane of the cells with the modified surface was investigated by high resolution fluorescence microscopy.